Modelling of the dynamical behaviour of floating electrode MEMS

Panagiotis Giounanlis, Elena Blokhina, Orla Feely, Loukas Michalas, Matroni Koutsoureli, George J. Papaioannou. Modelling of the dynamical behaviour of floating electrode MEMS. In 2015 IEEE International Symposium on Circuits and Systems, ISCAS 2015, Lisbon, Portugal, May 24-27, 2015. pages 1322-1325, IEEE, 2015. [doi]

Abstract

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