Vertically Stacked CMOS-Compatible Photodiodes for Scanning Electron Microscopy

Lionel C. Gontard, Juan Antonio Leñero-Bardallo, Francisco M. Varela-Feria, Ricardo Carmona-Galán. Vertically Stacked CMOS-Compatible Photodiodes for Scanning Electron Microscopy. In IEEE International Symposium on Circuits and Systems, ISCAS 2020, Sevilla, Spain, October 10-21, 2020. pages 1-5, IEEE, 2020. [doi]

Abstract

Abstract is missing.