Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing

Timothy Guan, Ye Chow Kuang, Melanie Po-Leen Ooi, Xiang Gin Cheah, Yeung Shun Tan, Serge N. Demidenko. Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing. In Sixth IEEE International Symposium on Electronic Design, Test and Application, DELTA 2011, Queenstown, New Zealand, 17-19 January, 2011. pages 189-194, IEEE, 2011. [doi]

Abstract

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