Taotao Guan, Fang Yang, Wei Wang 0087, Peng Liu, Zexin Fan, Leijian Cheng, Zikun Chen, Runze Yu, Qiancheng Zhao, Wei Wang, Dacheng Zhang. A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 397-400, IEEE, 2018. [doi]
Abstract is missing.