Student Realization in Cleanroom of Silicon-Germanium Thin Film Transistors

D. Guillet, K. Mourgues, R. Rogel, H. Lhermite, Olivier Bonnaud. Student Realization in Cleanroom of Silicon-Germanium Thin Film Transistors. In IEEE International Conference on Microelectronic Systems Education, MSE 1999, July 19-21, 1999, Arlington, Virginia, USA. pages 69-70, IEEE Computer Society, 1999. [doi]

Abstract

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