Jing Guo, Fan Yang, Subarna Sinha, Charles Chiang, Xuan Zeng. Improved tangent space based distance metric for accurate lithographic hotspot classification. In Patrick Groeneveld, Donatella Sciuto, Soha Hassoun, editors, The 49th Annual Design Automation Conference 2012, DAC '12, San Francisco, CA, USA, June 3-7, 2012. pages 1173-1178, ACM, 2012. [doi]
Abstract is missing.