Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography - researchr publication

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Mohit Gupta, Kwangok Jeong, Andrew B. Kahng. Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 29(8):1229-1242, 2010. [doi]

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