Detailed placement for improved depth of focus and CD control

Puneet Gupta, Andrew B. Kahng, Chul-Hong Park. Detailed placement for improved depth of focus and CD control. In Ting-Ao Tang, editor, Proceedings of the 2005 Conference on Asia South Pacific Design Automation, ASP-DAC 2005, Shanghai, China, January 18-21, 2005. pages 343-348, ACM Press, 2005. [doi]

Abstract

Abstract is missing.