Performance Driven OPC for Mask Cost Reduction

Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, Jie Yang. Performance Driven OPC for Mask Cost Reduction. In 6th International Symposium on Quality of Electronic Design (ISQED 2005), 21-23 March 2005, San Jose, CA, USA. pages 270-275, IEEE Computer Society, 2005. [doi]

Abstract

Abstract is missing.