High-precision spiral positioning control of a piezoelectric tube scanner used in an atomic force microscope

Habibullah, Hemanshu Roy Pota, Ian R. Petersen. High-precision spiral positioning control of a piezoelectric tube scanner used in an atomic force microscope. In American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014. pages 1625-1630, IEEE, 2014. [doi]

Abstract

Abstract is missing.