Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams

Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach, Martin Börner. Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams. Micromachines, 1(2):68-81, 2010. [doi]

Abstract

Abstract is missing.