Robert Havey, Lixin Wang, Dongjin Kim. Application of tool science techniques to improve tool efficiency for a dry etch cluster tool. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 1926-1931, WSC, 2011. [doi]
Abstract is missing.