Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging

R. W. Herfst, R. J. F. Bijster, A. Dekker, J. Wei, H. W. van Zeijl, R. Kruidhof, H. Sadeghian. Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017. pages 1310-1315, IEEE, 2017. [doi]

Abstract

Abstract is missing.