Norbert Herfurth, Anne Beyreuther, Elham Amini, Christian Boit, Michél Simon-Najasek, Susanne Hübner, Frank Altmann, R. Herfurth, C. Wu, I. De Wolf, K. Croes. New Access to Soft Breakdown Parameters of Low-k Dielectrics Through Localisation-Based Analysis. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-9, IEEE, 2019. [doi]
Abstract is missing.