Cost-effective cleaning and high-quality thin gate oxides

Marc M. Heyns, Twan Bearda, Ingrid Cornelissen, Stefan De Gendt, Robin Degraeve, Guido Groeseneken, Conny Kenens, D. Martin Knotter, Lee M. Loewenstein, Paul W. Mertens, Sofie Mertens, Marc Meuris, Tanya Nigam, Marc Schaekers, Ivo Teerlinck, Wilfried Vandervorst, Rita Vos, Klaus Wolke. Cost-effective cleaning and high-quality thin gate oxides. IBM Journal of Research and Development, 43(3):339-350, 1999. [doi]

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