Process-induced charging damage in IGZO nTFTs

Gaspard Hiblot, Nouredine Rassoul, Lieve Teugels, Katia Devriendt, Adrian Vaisman Chasin, Michiel van Setten, Attilio Belmonte, Romain Delhougne, Gouri Sankar Kar. Process-induced charging damage in IGZO nTFTs. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-8, IEEE, 2021. [doi]

Abstract

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