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Advanced RTN Analysis on 3D NAND Trench Devices Using Physics-Informed Machine Learning Framework

Yusuke Higashi, Anirudh Varanasi, Philippe J. Roussel, Pablo Saraza-Canflanca, J. P. Bastos, Alexander Grill, E. Catapano, R. Asanovski, Jacopo Franco, Ben Kaczer, Adrian Chasin, Devin Verreck, S. Ramesh, Laurent Breuil, Antonio Arreghini, S. Rachidi, Y. Jeong, Geert Van den bosch, Maarten Rosmeulen, Robin Degraeve. Advanced RTN Analysis on 3D NAND Trench Devices Using Physics-Informed Machine Learning Framework. In IEEE International Reliability Physics Symposium, IRPS 2025, Monterey, CA, USA, March 30 - April 3, 2025. pages 1-6, IEEE, 2025. [doi]

Authors

Yusuke Higashi

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Anirudh Varanasi

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Philippe J. Roussel

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Pablo Saraza-Canflanca

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J. P. Bastos

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Alexander Grill

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E. Catapano

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R. Asanovski

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Jacopo Franco

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Ben Kaczer

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Adrian Chasin

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Devin Verreck

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S. Ramesh

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Laurent Breuil

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Antonio Arreghini

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S. Rachidi

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Y. Jeong

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Geert Van den bosch

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Maarten Rosmeulen

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Robin Degraeve

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