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Characterising the surface roughness of AFM grown SiO::2:: on Si

D. Hill, X. Blasco, M. Porti, M. Nafría, X. Aymerich. Characterising the surface roughness of AFM grown SiO::2:: on Si. Microelectronics Reliability, 41(7):1077-1079, 2001. [doi]

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D. Hill

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X. Blasco

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M. Porti

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M. Nafría

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X. Aymerich

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