Takashi Hiroi, Chie Shishido, Masahiro Watanabe. Pattern Alignment Method Based on Consistency Among Local Registration Candidates for LSI Wafer Pattern Inspection. In 6th IEEE Workshop on Applications of Computer Vision (WACV 2002), 3-4 December 2002, Orlando, FL, USA. pages 257-263, IEEE Computer Society, 2002. [doi]
Abstract is missing.