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Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale

Sören Hommel, Nicole Killat, A. Altes, Thomas Schweinböck, Doris Schmitt-Landsiedel, M. Silvestri, O. Haeberlen. Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale. Microelectronics Reliability, 64:310-312, 2016. [doi]

Authors

Sören Hommel

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Nicole Killat

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A. Altes

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Thomas Schweinböck

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Doris Schmitt-Landsiedel

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M. Silvestri

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O. Haeberlen

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