Hao Hong, Li Ye, Ke Li, Pasqualina M. Sarro, Guoqi Zhang, Zewen Liu 0003. Fabrication of Nanoslits with Etching TSWE Method. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 174-177, IEEE, 2021. [doi]
Abstract is missing.