Energy-Efficient Semiconductor Manufacturing: Establishing an Ecological Operating Curve

Anna Hopf, Abdelgafar Ismail, Hans Ehm, Daniel Schneider, Gunther Reinhart. Energy-Efficient Semiconductor Manufacturing: Establishing an Ecological Operating Curve. In Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022. pages 3453-3464, IEEE, 2022. [doi]

Abstract

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