Sylvain Housseman, Stéphane Dauzère-Pérès, Gloria Rodríguez-Verján, Jacques Pinaton. Smart dynamic sampling for wafer at risk reduction in semiconductor manufacturing. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 780-785, IEEE, 2014. [doi]
Abstract is missing.