Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes

Yi-Ta Hsieh, Yung-Chun Lee. Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 40-44, IEEE, 2012. [doi]

Abstract

Abstract is missing.