Residual Stress Analysis of Aluminum-doped Zinc Oxide Films under Laser-Induced Recovery Process

Yu-Chen Hsieh, Ching-Ching Yang, Chih-Chung Yang, Yu-Hsuan Lin, Kuo-Cheng Huang, Wen-Tse Hsiao. Residual Stress Analysis of Aluminum-doped Zinc Oxide Films under Laser-Induced Recovery Process. In Maria Raposo, Paulo A. Ribeiro, David Andrews, editors, Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2019, Prague, Czech Republic, February 25-27, 2019. pages 134-138, SciTePress, 2019. [doi]

Abstract

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