Chia-Wei Hsu, Chia-Hao Kuo, Hsing-Hui Hsu, Horng-Chih Lin, Tiao-Yuan Huang. Fabrication and characterization of a novel suspended-nanowire-channel thin-film transistor with nanometer air gap. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 313-316, IEEE, 2011. [doi]
Abstract is missing.