Shuo-Fu Hsu, Min-Hang Weng, Ru-Yuan Yang, Chun-Hsiung Fang, Jyh-Horng Chou. An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films. IEEE T. Automation Science and Engineering, 13(4):1588-1593, 2016. [doi]
Abstract is missing.