A differential capacitive sensing circuit for micro-machined omnidirectional microphone

Jung-Tang Huang, Kai-Si Chen, Chu-Che Chien. A differential capacitive sensing circuit for micro-machined omnidirectional microphone. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 948-951, IEEE, 2011. [doi]

Abstract

Abstract is missing.