Automatic virtual metrology system design and implementation

Yi-Ting Huang, Hsien-Cheng Huang, Fan-Tien Cheng, Tai-Siang Liao, Fu-Chien Chang. Automatic virtual metrology system design and implementation. In 2008 IEEE International Conference on Automation Science and Engineering, IEEE CASE 2008, Washington, DC, USA, August 23-26, 2008. pages 223-229, IEEE, 2008. [doi]

Abstract

Abstract is missing.