H. Huang, P. S. McLaughin, J. J. Kelly, C.-C. Yang, R. G. Southwick, M. Wang, G. Bonilla, G. Karve. Time Dependent Dielectric Breakdown of Cobalt and Ruthenium Interconnects at 36nm Pitch. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-5, IEEE, 2019. [doi]
Abstract is missing.