Kuo-Feng Huang, Sung-Wen Tsai, Yung-Chun Lee. Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 31-35, IEEE, 2012. [doi]
Abstract is missing.