Mao-Jung Huang, Chii-Rong Yang, Chien-Ying Su, Ming-Hua Shiao. Fabrication of silicon nanopillars array for developing PCs sensor. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 237-241, IEEE, 2013. [doi]
Abstract is missing.