Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage

Weicai Huang, Kaiming Yang, Yu Zhu, Xin Li 0058, Haihua Mu, Min Li 0016. Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage. J. Systems & Control Engineering, 234(6), 2020. [doi]

Abstract

Abstract is missing.