LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage

Tao Huang, Kaiming Yang, Yu Zhu, Qian Tang, Min Cheng, Yi Wang 0043. LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage. IEEE Transactions on Industrial Electronics, 66(11):8567-8577, 2019. [doi]

Abstract

Abstract is missing.