Takeshi Ihara, Atsushi Takahashi 0001, Chikaaki Kodama. Effective two-dimensional pattern generation for self-aligned double patterning. In 2015 IEEE International Symposium on Circuits and Systems, ISCAS 2015, Lisbon, Portugal, May 24-27, 2015. pages 2141-2144, IEEE, 2015. [doi]
Abstract is missing.