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High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters

Rimon Ikeno, Takashi Maruyama, Satoshi Komatsu, Tetsuya Iizuka, Makoto Ikeda, Kunihiro Asada. High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters. IEICE Transactions, 96-A(12):2458-2466, 2013. [doi]

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