Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa. Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications. Microelectronics Reliability, 53(9-11):1381-1386, 2013. [doi]
Abstract is missing.