A volume diagnosis method for identifying systematic faults in lower-yield wafer occurring during mass production

Tsutomu Ishida, Izumi Nitta, Koji Banno, Yuzi Kanazawa. A volume diagnosis method for identifying systematic faults in lower-yield wafer occurring during mass production. In 19th Asia and South Pacific Design Automation Conference, ASP-DAC 2014, Singapore, January 20-23, 2014. pages 670-675, IEEE, 2014. [doi]

Abstract

Abstract is missing.