On-chip fabrication and assembly of rotational microstructures

Masaki Ito, Masahiro Nakajima, Hisataka Maruyama, Toshio Fukuda. On-chip fabrication and assembly of rotational microstructures. In 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 11-15, 2009, St. Louis, MO, USA. pages 1849-1854, IEEE, 2009. [doi]

Abstract

Abstract is missing.