Atomic force microscopy using voice coil actuators for vibration isolation

Shingo Ito, Daniel Neyer, Stefan Pirker, J├╝rgen Steininger, Georg Schitter. Atomic force microscopy using voice coil actuators for vibration isolation. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2015, Busan, South Korea, July 7-11, 2015. pages 470-475, IEEE, 2015. [doi]

Abstract

Abstract is missing.