Atomic force microscopy using voice coil actuators for vibration isolation

Shingo Ito, Daniel Neyer, Stefan Pirker, Jürgen Steininger, Georg Schitter. Atomic force microscopy using voice coil actuators for vibration isolation. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2015, Busan, South Korea, July 7-11, 2015. pages 470-475, IEEE, 2015. [doi]

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