Sitaraman V. Iyer, Hasnain Lakdawala, Rajarishi S. Sinha, Eric J. Zacherl, Richard T. Unetich, Daniel M. Gaugel, David F. Guillou, L. Richard Carley. 2 integrated capacitive vibration sensor with sub-10 zF/rt-Hz noise floor. In Proceedings of the IEEE 2005 Custom Integrated Circuits Conference, CICC 2005, DoubleTree Hotel, San Jose, California, USA, September 18-21, 2005. pages 93-96, IEEE, 2005. [doi]
Abstract is missing.