A Methodology for an FPGA Implementation of a Programmable Logic Controller to Control an Atomic Layer Deposition System - researchr publication

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Peter Jamieson, Donald Blank, Janelle Ghanem, Tyler McGrew, Giancarlo Corti. A Methodology for an FPGA Implementation of a Programmable Logic Controller to Control an Atomic Layer Deposition System. Int. J. Reconfig. Comp., 2022, 2022. [doi]

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