Mohammad Tariq Jan, Farooq Ahmad, Nor Hisham Hamid, Mohd Haris M. Khir, Khalid Ashraf, Muhammad Shoaib. Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach. Microelectronics Reliability, 57:64-70, 2016. [doi]
Abstract is missing.