CameraMan - Robot Cell with Flexible Vision Feedback for Automated Nanohandling inside SEMs

Daniel Jasper, Christian Dahmen, Sergej Fatikow. CameraMan - Robot Cell with Flexible Vision Feedback for Automated Nanohandling inside SEMs. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 51-56, IEEE, 2007. [doi]

Abstract

Abstract is missing.