Cuiping Jia, Wei Dong, Caixia Liu, Xindong Zhang, Jingran Zhou, Zhicheng Zhong, Hailin Xue, Huidong Zang, Baokun Xu, Weiyou Chen. Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon. Microelectronics Journal, 37(11):1297-1301, 2006. [doi]
Abstract is missing.