Zhuangde Jiang, Libo Zhao, Yulong Zhao, Philip D. Prewett, Kyle Jiang. Research and evaluation of a high temperature pressure sensor chip. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 661-665, IEEE, 2009. [doi]
Abstract is missing.