Fabrication of Microbolometer Arrays Based on Polymorphous Silicon-Germanium

Ricardo Jimenez, Mario Moreno, Alfonso Torres, Alfredo Morales, Arturo Ponce, Daniel Ferrusca, Jose de Jesus Rangel-Magdaleno, Jorge Castro-Ramos, Julio Noel Hernandez-Perez, Eduardo Cano. Fabrication of Microbolometer Arrays Based on Polymorphous Silicon-Germanium. Sensors, 20(9):2716, 2020. [doi]

Abstract

Abstract is missing.