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P. C. Juan, K. C. Lin, H. Y. Chu, Y.-C. Kuo, H. W. Wang, T. Y. Shih. 2 dielectric layer sputtered with TiN or ZrN for sandwich-like metal-insulator-metal capacitors. Microelectronics Reliability, 83:242-248, 2018. [doi]
Abstract is missing.