Modeling and Control of a Six-Axis Parallel Piezo-Flexural Micropositioning Stage With Cross-Coupling Hysteresis Nonlinearities

Shengzheng Kang, Hongtao Wu 0001, Shengdong Yu, Yao Li, Xiaolong Yang, Jiafeng Yao. Modeling and Control of a Six-Axis Parallel Piezo-Flexural Micropositioning Stage With Cross-Coupling Hysteresis Nonlinearities. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2020, Boston, MA, USA, July 6-9, 2020. pages 1350-1355, IEEE, 2020. [doi]

Abstract

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